상품명 | 1700℃ 튜브전기로 패키지(CVD,annealing) FU-PK-S3 (300mm Ø100) |
---|---|
판매가 | 27,863,120원 (VAT 별도) |
모델 | SH-FU-PK-S3 |
상품요약정보 | Chemical Vapor Deposition (CVD, 화학기상증착) 공정용 전기로, annealing(소둔)용 전기로, Gas Flow package+이동형Frame + chiller + 진공펌프로 완변한 구성 |
배송 | 택배가 불가능한(고중량 제품) 직납운임비 지역별차등 |
배송비 | 5,500원 (100,000원 이상 구매 시 무료) |
SNS 상품홍보 | ![]() ![]() |
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Tube Furnace Package
Package Model | FU-PK-S3 |
---|---|
Furnace Model | SH-FU-100TS-WG |
Chiller | SH-WB-5CDR(-30) |
Vacuum Pump | SH-V10 |
Oil Mist Trap | VOT-1020 |
Table | Moving Frame |
Dimension | 1265x800x1970mm
49.80x31.49x77.56'' |
Cat.NO | FUPKS3300-17 |
Gas Flow Package
Model | SH-FU-100TS-WG |
---|---|
Furnace | SH-FU-100TS |
Components | Gas Flowmeter 1EA |
Stainless Steel Pipe & Connector | |
Gas Sealing Mask | |
Alumina Tube (Length 1000 mm) | |
Cat. No. | FU100TS-17WG230 |
Model | SH-FU-100TS |
---|---|
Max Temp | 1700℃ (3092℉) |
Temp Controller | Programmable Controller(SP590) |
Sensor | R type |
Applicable Tube Diameter | 100 Φ |
Heater Capa | 6.9 KW |
Dimension Hot Zone | Length 300 mm |
Dimension External
(W×D×H ) |
690x600x1030mm
27.17x23.62x40.55'' |
Weight | 131 Kg |
Heater Element | MoSi 2 |
Insulation | Ceramic Board & Wool |
Electrical Requirements
230V ,50/60Hz, 1Φ |
30 A |
Cat. No. 50Hz(60Hz) | FU100TS230-17 |
Recirculating Chiller
Model | SH-WB-5CDR | |
---|---|---|
Order Number | SH-WB-5CDR(-30) | |
Temp Controller | Microprocessor digital controller | |
Temp Control Range | Ambient -50℃ to Ambient (Low limit -30℃)
Ambient -28℉ to Ambient | |
Reservior Capa | 5 L | |
Recirculating
Pump |
Max flow | 15.6 L/min |
Max pressure | 22 psig | |
Dimension Internal
(Φ×H) |
180Φ×210Hmm
7.09Φx8.27H'' | |
Dimension External
(W×D×H) |
465×560×847mm
18.18x22.04x33.35'' | |
Weight | 48 Kg | |
Material Internal | Stainless Steel | |
Material External | Steel Plate With Powder Heating Coated | |
Power | 230V, 60Hz, 1Φ | |
Cat. No. | WB5CDR-30230-60 |
Vacuum Pump
고성능의 SH-V series 진공펌프입니다.
실린더 구조와 혁신적인 오일순환 시스템으로 안정적이고 강한 내구성을 자랑합니다.
자동 역흡입방지 밸브(anti-sucking back valve)와 2단계 가스밸러스트 밸브기능으로 최상의 신뢰성을 확보해 줍니다.
Model | SH-V10 |
---|---|
Pumping Speed(50/60Hz) | 78L/min |
Ultimate total pressure gas
ballast close |
5x10-2 Pa
( 3.7x10-4 torr ) |
Ultimate total pressure gas
ballast open |
3 Pa
( 2.2x10-2 torr ) |
Power supply | 220V,50/60Hz or 110V,50/60Hz |
Power rating(kw) | 0.4(1 Phase) |
Inlet/Exhaust Flange | KF 16/25 |
Oil capacity(L) | 0.6~1.0 |
Ambient temperature(℃) | 5~40 |
Noise level(dB) | ≤56 |
Weight(kg) | 19 |
Recommended for
|
Vacuum Drying Ovens
(SH-VDO-08NG, SH-VDO-30NG, SH-VDO-70NG, SH-VDO-30NS, SH-VDO-70NS) Tube Furnace All Packages |
Dimensions | ||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
Model | A | B | C | D | E | G | H | I | J | K | L | DN |
SH-V10 | 460 | 144 | 207 | 210 | 110 | 126 | 154 | 45 | 45 | 34 | / | KF16/25 |
Mass Flow Controller(Multi gas selectable)
Model | MC Series | MCS Series | MCSS Series | MCV Series |
---|---|---|---|---|
Type | General | For Toxi Gas | For Toxi Gas (Cl2, SO2, HCl 포함) | For Vacuum |
Flow Range | 0 ~ 1 slpm / 0 ~ 5 slpm | |||
Mass Flow Accuracy at
calibration conditions |
±0.6% of reading or ±0.1% of full scale | ±0.8% of reading or ±0.2% of full scale | ||
Operating Temperature Range | -10 to +60°C | |||
Temperature Accuracy | ±0.75°C | |||
Operating Pressure full scale | 145 PSIG | |||
Pressure Accuracy | Above 1 atm: ±0.5% of reading | |||
Typical Indication Response Time | < 10 ms | < 100 ms | ||
Typical Warm-Up Time | <1 Second | |||
Monochrome LCD | Simultaneously displays
mass Flow, pressure and temperature |
Simultaneously displays mass Flow,
Volumetric Flow, pressure and temperature | ||
Mechanical Dimensions
(HxWxD) |
104.14x91.44x27.94mm / 4.1x3.6x1.1" | 121.92x172.72x38.1mm /4.8x6.8x1.5" | ||
Gas Selectable | 98 Gas | 128 Gas (Cl2, SO2, HCl 제외) | 131 Gas (Cl2, SO2, HCl 포함) | 98 Gas |
Communication | RS-232 |
Mass Flow Controller(Multi gas selectable)
Model | BPR Series | BPRV Series | BPRS Series | BPRSS Series |
---|---|---|---|---|
Type | General | For Vacuum(음압용)
|
For Toxi Gas (CL2, HCl, SO2 제외) | For Toxi Gas (CL2, HCl, SO2 포함) |
Pressure Range | 1PSIG ~ 15PSIG | 0PSIG ~ 1PSIG(0 ~ 760torr) | 1PSIG ~ 15PSIG | |
Standard Accuracy | ± 0.25% (≥ 1 psi) | |||
Repeatability | ± 0.08% Full Scale | |||
Typical Response Time | < 100 ms | |||
Warm-up Time | < 1 Second | |||
Operating Temperature | -10 to +60℃ | |||
Monochrome LCD | Displays Pressure | |||
Mechanical Dimensions
(HxWxD) |
104.14x91.4x27.94mm / 4.1x3.6x1.1" | |||
Communication | RS-232 |
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